US 12,146,896 B2
Analysis apparatus, analysis method, and recording medium having recorded thereon analysis program
Yuji Sakai, Tokyo (JP); and Hajime Sugimura, Saitama (JP)
Assigned to ADVANTEST CORPORATION, Tokyo (JP)
Filed by ADVANTEST CORPORATION, Tokyo (JP)
Filed on Mar. 16, 2021, as Appl. No. 17/202,382.
Application 17/202,382 is a continuation of application No. PCT/JP2019/013045, filed on Mar. 26, 2019.
Claims priority of application No. 2018-193325 (JP), filed on Oct. 12, 2018.
Prior Publication US 2021/0199694 A1, Jul. 1, 2021
Int. Cl. G01R 1/067 (2006.01); G01R 31/28 (2006.01); G06N 20/00 (2019.01)
CPC G01R 1/06794 (2013.01) [G01R 31/2831 (2013.01); G06N 20/00 (2019.01)] 16 Claims
OG exemplary drawing
 
1. An analysis apparatus comprising:
at least one processor;
an acquisition unit configured to acquire a plurality of measured values obtained by measuring a device under measurement using the at least one processor;
a machine learning unit configured to use the plurality of measured values to learn, by machine learning, a model of a position-dependent component that depends on a measured position in the device under measurement using the at least one processor; and
an analysis unit configured to separate, from the plurality of measured values, the position-dependent component which is calculated by using the model learned by the machine learning unit using the at least one processor,
wherein the device under measurement includes a plurality of devices under measurement, and the acquisition unit is configured to acquire the plurality of measured values obtained by measuring the plurality of devices under measurement at different positions in a jig, and
wherein the analysis unit is configured to separate, from the plurality of measured values, the position-dependent component that depends on a measured position in the jig.