US 12,146,893 B2
Low-noise multi-axis accelerometers and related methods
Xin Zhang, Acton, MA (US)
Assigned to Analog Devices, Inc., Wilmington, MA (US)
Filed by Analog Devices, Inc., Wilmington, MA (US)
Filed on Jul. 20, 2021, as Appl. No. 17/380,601.
Application 17/380,601 is a continuation of application No. 16/171,302, filed on Oct. 25, 2018, granted, now 11,099,207.
Prior Publication US 2021/0349123 A1, Nov. 11, 2021
Int. Cl. G01P 15/18 (2013.01); G01P 15/08 (2006.01); G01P 15/125 (2006.01)
CPC G01P 15/18 (2013.01) [G01P 15/125 (2013.01); G01P 2015/0814 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A microelectromechanical system (MEMS) accelerometer comprising:
an articulated proof mass comprising first and second portions coupled to each other by first and second couplers compliant with respect to out-of-plane rotation of the first and second portions in opposite directions and stiff with respect to both common in-plane translation of the first and second portions in a first in-plane direction and common in-plane translation of the first and second portions in a second in-plane direction different than the first in-plane direction, the first portion being rotatably tethered to a first anchor and the second portion being rotatably tethered to a second anchor;
a first sensor configured to sense in-plane translation of the articulated proof mass in the first in-plane direction; and
a second sensor configured to sense in-plane translation of the articulated proof mass in the second in-plane direction.