US 12,146,734 B2
Apparatus and method for determining three-dimensional shape of object
Chan Kwon Lee, Ansan-si (KR); Moon Young Jeon, Seongnam-si (KR); Deok Hwa Hong, Gwangmyeong-si (KR); and Joong Ki Jeong, Gwangmyeong-si (KR)
Assigned to KOH YOUNG TECHNOLOGY INC., Seoul (KR)
Appl. No. 17/623,498
Filed by KOH YOUNG TECHNOLOGY INC., Seoul (KR)
PCT Filed Jun. 29, 2020, PCT No. PCT/KR2020/008462
§ 371(c)(1), (2) Date Dec. 28, 2021,
PCT Pub. No. WO2020/263055, PCT Pub. Date Dec. 30, 2020.
Claims priority of application No. 10-2019-0077638 (KR), filed on Jun. 28, 2019.
Prior Publication US 2022/0397390 A1, Dec. 15, 2022
Int. Cl. G01B 11/25 (2006.01); G01B 11/24 (2006.01); G01B 11/27 (2006.01); H01L 21/66 (2006.01)
CPC G01B 11/254 (2013.01) [G01B 11/2433 (2013.01); G01B 11/2509 (2013.01); G01B 11/2527 (2013.01); G01B 11/272 (2013.01); H01L 22/12 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A detachable angle determination device coupled to a shape determination device that determines a first three-dimensional shape of an object located on a reference plane, and configured to determine an angle of an upper surface of the object with respect to the reference plane, the detachable angle determination device comprising:
a first light source configured to sequentially irradiate one or more first pattern lights having one phase range;
a beam splitter and one or more lenses configured to change optical paths of the one or more first pattern lights so that a beam of light corresponding to a respective phase of the phase range spreads, and arrives at each point of a partial region of the upper surface of the object;
a communication interface configured to communicate with the shape determination device; and
a first processor that is electrically connected to the first light source and the communication interface, and that is configured to:
obtain, from an image sensor of the shape determination device, first information on one or more first reflected lights generated by reflecting the one or more first pattern lights from the partial region;
determine the angle of the upper surface with respect to the reference plane based on the first information;
control the communication interface to obtain third information indicating the first three-dimensional shape of the object determined based on each of phase changes of one or more second reflected lights from one or more second pattern lights from the shape determination device; and
generate the second information indicating the angle of the upper surface with respect to the reference plane based on the first information indicating each light amount
value of the one or more first reflected lights, and
wherein the second information is used to determine a second three-dimensional shape of the object by correcting the upper surface of the object indicated by the first three-dimensional shape.