US 12,146,732 B2
Surface contour measurement
Steven W. Meeks, Palo Alto, CA (US); Hung Phi Nguyen, Santa Clara, CA (US); and Alireza Shahdoost Moghaddam, San Jose, CA (US)
Assigned to Lumina Instruments Inc., San Jose, CA (US)
Filed by Lumina Instruments Inc., San Jose, CA (US)
Filed on Mar. 3, 2022, as Appl. No. 17/685,706.
Application 17/685,706 is a continuation in part of application No. 17/576,986, filed on Jan. 16, 2022, granted, now 11,988,615.
Application 17/576,986 is a continuation in part of application No. 16/838,026, filed on Apr. 2, 2020, granted, now 11,255,796, issued on Feb. 22, 2022.
Application 16/838,026 is a continuation in part of application No. 16/289,632, filed on Feb. 28, 2019, granted, now 10,641,713, issued on May 5, 2020.
Prior Publication US 2022/0187057 A1, Jun. 16, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01B 11/06 (2006.01)
CPC G01B 11/06 (2013.01) 20 Claims
OG exemplary drawing
 
1. An optical scanning system, comprising:
a radiating source capable of outputting a source light beam, wherein the optical scanning system is configured to output the source light beam that is directed towards a sample at an incident angle;
a de-scan lens that is configured to output a de-scanned light beam, wherein the de-scanned light beam is created by focusing light reflected from the sample, and wherein the de-scan lens is located approximately one focal length of the de-scan lens from an irradiation location where the light beam irradiates the sample;
a focusing lens that is configured to output a focused light beam, wherein the focused light beam is created by focusing the de-scanned light beam output by the de-scan lens;
a first non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam;
a second non-polarizing beam splitter configured to be irradiated by at least a portion of the focused light beam that is reflected by the first non-polarizing beam splitter; and
a first detector that is located at approximately one focal length of the focusing lens from the focusing lens, wherein the first detector is configured to be irradiated by at least a portion of the focused light beam that is not reflected by the second non-polarizing beam splitter.