US 12,146,483 B2
System for supplying chemical solution
Chih-Chiang Tseng, Hsinchu County (TW); Ming-Lee Lee, Kaohsiung (TW); and Chiang Jen Chen, Hsinchu (TW)
Assigned to TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed by TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu (TW)
Filed on Jun. 21, 2023, as Appl. No. 18/338,354.
Application 18/338,354 is a division of application No. 16/932,649, filed on Jul. 17, 2020, granted, now 11,721,561.
Prior Publication US 2023/0335416 A1, Oct. 19, 2023
Int. Cl. F04B 49/00 (2006.01); G01R 29/12 (2006.01); H01L 21/67 (2006.01)
CPC F04B 49/00 (2013.01) [G01R 29/12 (2013.01); H01L 21/67017 (2013.01); F04B 2203/00 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A system for supplying chemical solutions comprising:
a chemical storage tank;
a pipeline connected to the chemical storage tank;
a pump connected to the pipeline and configured to pump a chemical solution from the chemical storage tank into the pipeline, wherein the pump comprises at least one moving element, and the at least one moving element comprises a check ball;
a first electrostatic probe coupled to the pump and configured to measure an electrostatic voltage of the pump, wherein the first electrostatic probe is proximate to the at least one moving element; and
a control unit coupled to the first electrostatic probe and configured to obtain the measurement of the electrostatic voltage from the first electrostatic probe.