	US 12,146,480 B2
	Cryopump
John J. Casello, Chelmsford, MA (US); Paul K. Mahoney, Chelmsford, MA (US); and Gerald M. Szarek, Chelmsford, MA (US)
Assigned to Edwards Vacuum LLC, Sanborn, NY (US)
Appl. No. 17/775,081
Filed by Edwards Vacuum LLC, Sanborn, NY (US)
PCT Filed Nov. 6, 2020, PCT No. PCT/IB2020/060471 § 371(c)(1), (2) Date May 6, 2022, PCT Pub. No. WO2021/094886, PCT Pub. Date May 20, 2021.
Claims priority of application No. 1916358 (GB), filed on Nov. 11, 2019.
Prior Publication US 2022/0389921 A1, Dec. 8, 2022
Int. Cl. F04B 37/08 (2006.01); F04B 25/00 (2006.01)

CPC F04B 37/085 (2013.01) [F04B 25/00 (2013.01)]

15 Claims

1. A cryopump comprising:

a vessel comprising a frontal open area, said frontal open area comprising an inlet to said vessel;

a radiation shield;

a two-stage refrigerator extending into a side wall of said vessel at a portion of said side wall remote from said inlet, said portion of said side wall being at a point closer to a closed end of said vessel than to said inlet, a first stage of said refrigerator being thermally coupled to said radiation shield;

a first stage array arranged within said vessel and thermally coupled to said first stage of said refrigerator through a mounting element extending toward the inlet from the two-stage refrigerator within the radiation shield;

a cryopanel structure coupled to a second stage of said refrigerator;

said first stage array comprising a plurality of elements arranged at increasing distances from said inlet, with an element of the plurality of elements closest to said inlet being located between said inlet and said cryopanel structure and having a smaller outer perimeter than all other elements of the plurality of elements, and each of the plurality of elements other than the element closest to said inlet having a respective passage through a central portion of the element and wherein the mounting element positions all of the elements in the plurality of elements closer to the inlet than the two-stage refrigerator is to the inlet.