US 12,146,219 B2
Flow control features of CVD chambers
Kien N. Chuc, Cupertino, CA (US); Qiwei Liang, Fremont, CA (US); Hanh D. Nguyen, San Jose, CA (US); Xinglong Chen, San Jose, CA (US); Matthew Miller, Newark, CA (US); Soonam Park, Sunnyvale, CA (US); Toan Q. Tran, San Jose, CA (US); Adib M. Khan, Santa Clara, CA (US); Jang-Gyoo Yang, San Jose, CA (US); Dmitry Lubomirsky, Cupertino, CA (US); and Shankar Venkataraman, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 16, 2020, as Appl. No. 16/745,141.
Application 16/745,141 is a division of application No. 14/481,774, filed on Sep. 9, 2014, granted, now 10,550,472.
Application 14/481,774 is a division of application No. 12/836,726, filed on Jul. 15, 2010, granted, now 8,894,767, issued on Nov. 25, 2014.
Claims priority of provisional application 61/234,120, filed on Aug. 14, 2009.
Claims priority of provisional application 61/233,706, filed on Aug. 13, 2009.
Claims priority of provisional application 61/225,890, filed on Jul. 15, 2009.
Prior Publication US 2020/0149166 A1, May 14, 2020
Int. Cl. C23C 16/455 (2006.01); C23C 16/452 (2006.01); H01J 37/32 (2006.01)
CPC C23C 16/45565 (2013.01) [C23C 16/452 (2013.01); C23C 16/45574 (2013.01); H01J 37/3244 (2013.01); H01J 37/32449 (2013.01); Y10T 137/85938 (2015.04)] 21 Claims
OG exemplary drawing
 
11. A manifold comprising an outer rim surrounding an inner plate, the inner plate having:
a plurality of second apertures formed therethrough from a first side to a second side of the inner plate, each second aperture comprising a first diameter at the first side and a second diameter at the second side of the inner plate; and
a plurality of third apertures formed through the inner plate from the first side to the second side of the inner plate and concentrically disposed around a center portion of the inner plate, each second aperture being surrounded in a hexagonal pattern by third apertures of the plurality of third apertures,
wherein the plurality of third apertures is fluidly isolated from the plurality of second apertures,
wherein the first diameter of each second aperture at a first side of the inner plate is greater than a first diameter of each third aperture at the first side of the inner plate,
wherein the second diameter of each second aperture at a second side of the inner plate is greater than a second diameter of each third aperture at the second side of the inner plate,
wherein the second diameter of each second aperture at the second side of the inner plate is greater than the first diameter of each second aperture at the first side of the inner place,
wherein the second diameter of each third aperture at the second side of the inner plate is less than the first diameter of each third aperture at the first side of the inner plate, and
wherein at least one aperture of the plurality of third apertures comprises:
a first cylindrical portion having the first diameter of each third aperture;
a second cylindrical portion having a third diameter that is smaller than the first diameter of each third aperture;
a transitional portion coupling the second cylindrical portion to the first cylindrical portion, the transitional portion tapering inward from the first cylindrical to the second cylindrical portion;
a third cylindrical portion coupled to the second cylindrical portion, the third cylindrical portion having a fourth diameter that is smaller than the third diameter; and
a fourth cylindrical portion coupled to the third cylindrical portion, the fourth cylindrical portion having the second diameter of each third aperture.