US 12,146,218 B2
Precursor container
Tom Blomberg, Masala (FI)
Assigned to Picosun Oy, Espoo (FI)
Filed by Picosun Oy, Espoo (FI)
Filed on Nov. 21, 2023, as Appl. No. 18/516,087.
Application 18/516,087 is a division of application No. 17/903,173, filed on Sep. 6, 2022, granted, now 11,873,558.
Claims priority of application No. 20215940 (FI), filed on Sep. 7, 2021.
Prior Publication US 2024/0084449 A1, Mar. 14, 2024
Int. Cl. C23C 16/455 (2006.01)
CPC C23C 16/45544 (2013.01) [C23C 16/45512 (2013.01); C23C 16/45561 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A method for handling precursor material in a precursor container comprising a first volume formed by a first chamber, a second volume formed by a second chamber, the second volume being separated from the first volume by a gas-permeable partition wall, the method comprising: increasing the pressure in the first volume to cause precursor material housed within the first volume to extend from the first volume to the second volume along a conduit passing through the partition wall, wherein the conduit comprises an inlet disposed in the first volume and immersed in the precursory material, below a surface level or meniscus of the precursory material, and an outlet disposed in the second volume; and providing a gas flow from the first volume to the second volume through the gas-permeable partition wall.