US 12,145,840 B2
MEMS sensor as well as method for operating a mems sensor
Arne Dannenberg, Metzingen (DE); and Mike Schwarz, Frankenberg (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Appl. No. 17/291,864
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Jan. 20, 2020, PCT No. PCT/EP2020/051257
§ 371(c)(1), (2) Date May 6, 2021,
PCT Pub. No. WO2020/152090, PCT Pub. Date Jul. 30, 2020.
Claims priority of application No. 10 2019 200 917.4 (DE), filed on Jan. 25, 2019.
Prior Publication US 2022/0009769 A1, Jan. 13, 2022
Int. Cl. B81B 7/00 (2006.01); G01K 7/01 (2006.01); G01L 9/06 (2006.01)
CPC B81B 7/0096 (2013.01) [G01K 7/01 (2013.01); G01L 9/065 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0127 (2013.01); B81B 2207/017 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A MEMS sensor, comprising:
a deflectably situated functional layer;
a conversion device configured to convert a deflection of the functional layer into an electrical signal, the conversion device including at least one electrical element,
the at least one electrical element being at least partially electrically connected to a first area, and the first area being at least partially electrically connected to a second area, the first and second areas and/or the first area and the at least one electrical element being electrically operable in a reverse direction and a forward direction; and
a control unit configured to at least partially operate the at least one electrical element and the first area and/or the first area and the second area, in the forward direction to provide thermal energy,
wherein a voltage may be applied to the first area and/or the second area with the aid of a respective multitude of contactings, the contactings including vias, the current flowing through the multitude of contactings being distributed across an enlarged cross-sectional surface of a p/n junction of the first and second areas.