US 12,145,171 B2
Substrate treating apparatus
Jun Sawashima, Kyoto (JP); and Takahiro Yamaguchi, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., (JP)
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
Filed on Jan. 14, 2022, as Appl. No. 17/575,685.
Claims priority of application No. 2021-022362 (JP), filed on Feb. 16, 2021.
Prior Publication US 2022/0258196 A1, Aug. 18, 2022
Int. Cl. B05C 5/02 (2006.01); B05C 11/10 (2006.01); B05C 13/02 (2006.01)
CPC B05C 5/0208 (2013.01) [B05C 11/1036 (2013.01); B05C 13/02 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate treating apparatus, comprising:
an indexer; and
a treating block located behind the indexer and is connected to the indexer,
the treating block including:
a transportation space extending in a front-back direction;
a transport mechanism located in the transportation space and configured to be movable in parallel in the front-back direction and to transport a substrate;
a first treating unit arranged on a first lateral side of the transportation space and configured to treat a substrate;
a second treating unit arranged on a second lateral side of the transportation space and configured to treat a substrate; and
a first liquid reservoir configured to store a treatment liquid to be distributed to the first treating unit and the second treating unit,
the first treating unit including:
a first holder configured to hold a substrate; and
a first liquid supplying unit configured to supply a treatment liquid to a substrate held by the first holder,
the second treating unit including:
a second holder configured to hold a substrate; and
a second liquid supplying unit configured to supply a treatment liquid to a substrate held by the second holder,
the transport mechanism transporting a substrate to the first holder and the second holder,
the first holder having a center point positioned more rearward than a middle point of the first treating unit in plan view,
the second holder having a center point positioned more forward than a middle point of the second treating unit in plan view,
the second treating unit having a front end located more rearward than a front end of the first treating unit and more forward than a rear end of the first treating unit, and
the first liquid reservoir being located on the second lateral side of the transportation space and adjacent to and in front of the second treating unit.