US 12,477,948 B2
Micro blower
Yung Ting, Chung Li (TW); Sheuan-Perng Lin, Chung Li (TW); Chih-Hsuan Yu, Chung Li (TW); and Reno Pangestu, Chung Li (TW)
Assigned to CHUNG-YUAN CHRISTIAN UNIVERSITY, Chung Li (TW)
Filed by CHUNG-YUAN CHRISTIAN UNIVERSITY, Chung Li (TW)
Filed on Jun. 13, 2023, as Appl. No. 18/209,066.
Claims priority of application No. 111123045 (TW), filed on Jun. 21, 2022.
Prior Publication US 2023/0413677 A1, Dec. 21, 2023
Int. Cl. H05K 7/20 (2006.01); H10N 30/20 (2023.01); H10N 30/80 (2023.01)
CPC H10N 30/2047 (2023.02) [H05K 7/20563 (2013.01); H10N 30/802 (2023.02)] 12 Claims
OG exemplary drawing
 
1. A micro blower, applied to a heat generating element, the micro blower comprising:
a base metal layer;
a flowing channel layer, connected to a top of the base metal layer, the flowing channel layer comprising:
a first chamber;
a second chamber;
an inlet channel, linking to the first chamber and comprising an inlet channel inlet size and an inlet channel outlet size, the inlet channel inlet size being smaller than the inlet channel outlet size;
a linking channel, linking to the first chamber and the second chamber and comprising a linking channel inlet size and a linking channel outlet size, the linking channel inlet size being smaller than the linking channel outlet size; and
an outlet channel, linking to the second chamber and comprising an outlet channel inlet size and an outlet channel outlet size, the outlet channel inlet size being smaller than the outlet channel outlet size;
a sandwich metal sheet, connected to a top of the flowing channel layer;
a capping layer, connected to a top of the sandwich metal sheet and comprising two accommodating regions, the two accommodating regions located above the first chamber and the second chamber, respectively; and
two first piezoelectric vibrators, located on tops and placed in centers of the two accommodating regions, respectively, and bonded on the top of the sandwich metal sheet, wherein each of the two first piezoelectric vibrators vibrates along a vibration direction when the two piezoelectric vibrators are driven, so as to change volumes of the first chamber and the second chamber to thereby generate an air flow.