US 12,477,862 B2
Cartridge inspection anchors
Gholamreza Chaji, Waterloo (CA); and Ehsanollah Fathi, Waterloo (CA)
Assigned to VueReal Inc., Waterloo (CA)
Appl. No. 17/785,964
Filed by VueReal Inc., Waterloo (CA)
PCT Filed Dec. 18, 2020, PCT No. PCT/CA2020/051758
§ 371(c)(1), (2) Date Jun. 16, 2022,
PCT Pub. No. WO2021/119836, PCT Pub. Date Jun. 24, 2021.
Claims priority of provisional application 62/950,708, filed on Dec. 19, 2019.
Prior Publication US 2022/0416116 A1, Dec. 29, 2022
Int. Cl. H01L 33/00 (2010.01); H10H 20/01 (2025.01)
CPC H10H 20/018 (2025.01) 9 Claims
OG exemplary drawing
 
1. A method to transfer a microdevice, the method comprising:
forming a micro device on a first substrate, the microdevice covered by a dielectric layer;
forming a release layer on top of the microdevice;
coupling a conductive layer to a microdevice contact through an opening in the dielectric layer;
bonding the microdevice to a second substrate through a bonding layer;
removing the microdevice from the first substrate;
patterning the dielectric layer to form anchors to hold the micro device;
removing the release layer creating a void only around part of the microdevice; and
transferring the micro device to a system substrate.