US 12,476,615 B2
Two-port acoustic wave sensor device
Sylvain Ballandras, Besançon (FR); Thierry LaRoche, Besançon (FR); Julien Garcia, Chamblay (FR); and Emilie Courjon, Franois (FR)
Assigned to Soitec, Bernin (FR)
Appl. No. 18/549,023
Filed by Soitec, Bernin (FR)
PCT Filed Mar. 3, 2022, PCT No. PCT/EP2022/055415
§ 371(c)(1), (2) Date Sep. 5, 2023,
PCT Pub. No. WO2022/184833, PCT Pub. Date Sep. 9, 2022.
Claims priority of application No. 2102073 (FR), filed on Mar. 3, 2021.
Prior Publication US 2024/0154603 A1, May 9, 2024
Int. Cl. H03H 9/64 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01)
CPC H03H 9/6413 (2013.01) [H03H 9/02574 (2013.01); H03H 9/14502 (2013.01); H03H 9/25 (2013.01)] 17 Claims
OG exemplary drawing
 
1. An acoustic wave sensor device, comprising:
a quartz material layer comprising a planar surface;
arranged along a first axis, a first interdigitated transducer disposed over the planar surface of the quartz material layer, a first reflection structure disposed over the planar surface of the quartz material layer, and a second reflection structure disposed over the planar surface of the quartz material layer; and
arranged along a second axis, a second interdigitated transducer disposed over the planar surface of the quartz material layer, a third reflection structure disposed over the planar surface of the quartz material layer, and a fourth reflection structure disposed over the planar surface of the quartz material layer;
and wherein:
the first axis and the second axis are inclined to each other by a finite angle; and
the planar surface of the quartz material layer is defined by a crystal cut of a quartz material of the quartz material layer with angles φ in the range of −14° to −24°, θ in the range of −25° to −45° and ψ in the range of +8° to +28°.