US 12,476,083 B2
Method for generating an RF signal, controller, RF generator and plasma apparatus
André Grede, Bern (CH); Daniel Gruner, Badenweiler (DE); Anton Labanc, Ehrenkirchen (DE); Roland Schlierf, Frechen (DE); Nikolai Schwerg, Bern (CH); and Manuel vor dem Brocke, Bramsche (DE)
Assigned to COMET AG, Flamatt (CH)
Appl. No. 18/269,697
Filed by COMET AG, Flamatt (CH)
PCT Filed Dec. 30, 2020, PCT No. PCT/EP2020/088012
§ 371(c)(1), (2) Date Jun. 26, 2023,
PCT Pub. No. WO2022/144080, PCT Pub. Date Jul. 7, 2022.
Prior Publication US 2024/0321553 A1, Sep. 26, 2024
Int. Cl. H01J 37/32 (2006.01)
CPC H01J 37/32183 (2013.01) [H01J 37/32926 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A method for generating an RF signal preferably for a plasma chamber comprising the steps of:
generating an input RF signal on the basis of a first set of control parameters;
detecting at least one distorted RF signal;
synchronizing the at least one distorted RF signal with the input RF signal;
determining a difference between a target RF signal and the at least one distorted RF signal being synchronized;
if the difference is larger than a predetermined threshold, determining a second set of control parameters based on a comparison of the target RF signal and the at least one distorted RF signal being synchronized; and
generating an adapted input RF signal on the basis of the second set of control parameters such that the difference between the target RF signal and the distorted RF signal is reduced,
wherein the input RF signal is modified to include a marker, wherein synchronizing the at least one distorted RF signal with the input RF signal comprises: detecting the marker in the distorted RF signal and determining the delay by the time difference between generating the marker in the input RF signal and detecting the marker in the distorted signal.
 
12. A controller, in particular for an RF generator, comprising:
a processing unit, preferably a digital signal processing unit, DSPU,
an output interface connected to the processing unit to provide control parameters to a frequency generation unit,
a signal analysis unit, preferably a software defined radio unit, SDR, connected to the processing unit; and
an input interface connected to the signal analysis unit and connectable to at least one sensor to receive at least one distorted RF signal as sensor data from the at least one sensor,
wherein the processing unit is configured to provide a first set of control parameters corresponding to an input RF signal to the output interface;
wherein the signal analysis unit is configured to receive from the input interface sensor data comprising the at least one distorted RF signal;
wherein the processing unit is configured to synchronize the at least one distorted RF signal with the input RF signal;
wherein the processing unit is further configured to determine a difference between a target RF signal and the at least one distorted RF signal being synchronized; if the difference is larger than a predetermined threshold, determining a second set of control parameters corresponding to an adapted input RF signal based on a comparison of the target RF signal and the at least one distorted RF signal being synchronized; and providing the second set of control parameters to the output interface,
wherein the input RF signal is modified to include a marker, wherein synchronizing the at least one distorted RF signal with the input RF signal comprises: detecting the marker in the distorted RF signal and determining the delay by the time difference between generating the marker in the input RF signal and detecting the marker in the distorted signal.