US 12,476,075 B2
Stack alignment techniques
Arjen Benjamin Storm, Delft (NL); Johan Frederik Cornelis Van Gurp, Berkel en Rodenrijs (NL); Johannes Cornelis Jacobus De Langen, Delft (NL); Aaron Yang-Fay Ayal, Roosendaal (NL); Michiel Matthieu Bruinink, Rijswijk (NL); Christiaan Ruben Van Den Berg, 's-Gravenzande (NL); Christiaan Otten, IJsselstein (NL); Laura Dinu Gurtler, Delft (NL); and Marc Smits, Pijnacker (NL)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Sep. 23, 2022, as Appl. No. 17/952,115.
Application 17/952,115 is a continuation of application No. PCT/EP2021/056519, filed on Mar. 15, 2021.
Claims priority of application No. 20165332 (EP), filed on Mar. 24, 2020.
Prior Publication US 2023/0020745 A1, Jan. 19, 2023
Int. Cl. H01J 37/153 (2006.01); G03F 9/00 (2006.01); H01J 37/09 (2006.01); H01J 37/20 (2006.01); H01J 37/28 (2006.01); H01J 37/317 (2006.01)
CPC H01J 37/3177 (2013.01) [G03F 9/7003 (2013.01); H01J 37/09 (2013.01); H01J 37/153 (2013.01); H01J 37/20 (2013.01); H01J 37/28 (2013.01); H01J 2237/24592 (2013.01); H01J 2237/2817 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A substrate stack comprising a plurality of substrates, wherein:
each substrate in the substrate stack comprises at least one alignment opening set;
the at least one alignment opening set in each substrate is aligned for a light beam to pass through corresponding alignment openings in each substrate; and
each substrate comprises at least one alignment opening that has a smaller diameter than the corresponding alignment openings in the other substrates.