US 12,476,070 B2
Charged particle beam device and scan waveform generation method
Keisuke Tanuma, Tokyo (JP); Masato Kamio, Tokyo (JP); Hironori Itabashi, Tokyo (JP); Hiroki Kannami, Tokyo (JP); Yusuke Seki, Tokyo (JP); Takumi Uezono, Tokyo (JP); and Mitsuhiro Nakamura, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 18/012,478
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Jul. 13, 2020, PCT No. PCT/JP2020/027252
§ 371(c)(1), (2) Date Dec. 22, 2022,
PCT Pub. No. WO2022/013918, PCT Pub. Date Jan. 20, 2022.
Prior Publication US 2023/0260739 A1, Aug. 17, 2023
Int. Cl. H01J 37/153 (2006.01); H01J 37/147 (2006.01); H01J 37/28 (2006.01)
CPC H01J 37/153 (2013.01) [H01J 37/1474 (2013.01); H01J 37/28 (2013.01); H01J 2237/1536 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A charged particle beam device that obtains an image by irradiating a specimen with a charged particle beam, the charged particle beam device comprising:
a deflection coil that scans the charged particle beam on the specimen;
a D/A converter that converts a digital scan waveform into an analog scan waveform and outputs the analog scan waveform to the deflection coil to drive the deflection coil; and
a scan waveform generation unit that generates the digital scan waveform and outputs the digital scan waveform to the D/A converter,
wherein the scan waveform generation unit has a look up table that stores parameters for correcting the digital scan waveform and includes a correction circuit that corrects a distortion characteristic of the deflection coil, and
wherein the scan waveform generation unit outputs the digital scan waveform according to a mode signal, and the mode signal is input from outside of the scan waveform generation unit and indicates whether to perform a correction of the distortion characteristic or to, without performing the correction of the distortion characteristic, capture an image without using a rising portion and a falling portion of the scan waveform.