| CPC H01J 37/1477 (2013.01) [H01J 2237/0453 (2013.01); H01J 2237/31774 (2013.01)] | 20 Claims |
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1. A charged-particle tool comprising:
a condenser lens array configured to separate a beam of charged particles into a first plurality of sub-beams along a respective beam path and to focus each of the sub-beams to a respective intermediate focus;
an array of objective lenses, each objective lens configured to project one of the sub-beams onto a sample;
a corrector comprising along the beam paths a first array of elongate electrodes, and a second array of elongate electrodes, the second array of elongate electrodes being substantially parallel to the first array of elongate electrodes, the first array of elongate electrodes adjoining the second array of elongate electrodes along the beam paths, the elongate electrodes of the first array of elongate electrodes extending substantially perpendicular to the beam paths of the first plurality of sub-beams and arranged such that a second plurality of the sub-beams propagate between a pair of the elongate electrodes of the first array of elongate electrodes, the second plurality of sub-beams being a subset of the first plurality of sub-beams, the elongate electrodes comprising parallel plates extending substantially parallel to the direction of propagation of the second plurality of sub-beams; and
an electric power supply configured to apply a potential difference between the pair of elongate electrodes of the first array of elongate electrodes so as to deflect the second plurality of sub-beams by a desired amount.
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