US 12,475,970 B2
MOKE measurement apparatus
Bum Jin Jang, Ansan-si (KR); and Do Hyeok Bae, Seoul (KR)
Assigned to INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS, Ansan-si (KR)
Filed by INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS, Ansan-si (KR)
Filed on Aug. 24, 2023, as Appl. No. 18/455,198.
Claims priority of application No. 10-2023-0020085 (KR), filed on Feb. 15, 2023; and application No. 10-2023-0041805 (KR), filed on Mar. 30, 2023.
Prior Publication US 2024/0274221 A1, Aug. 15, 2024
Int. Cl. G11C 29/56 (2006.01); G02F 1/09 (2006.01); G06F 1/20 (2006.01)
CPC G11C 29/56 (2013.01) [G02F 1/09 (2013.01); G06F 1/20 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A magneto-optical Kerr effect (MOKE) measuring device comprising:
a rotational chuck that vacuum-absorbs and rotates a plate-shaped MOKE measurement target on which a magnetic random access memory (MRAM) die is formed;
a frame arranged on an upper portion of the rotational chuck;
a first magnetic field generator that is connected to the frame through a first connecting portion and includes a first coil arranged to be inclined at a preset angle with respect to the rotational chuck and generates a magnetic field;
a second magnetic field generator that is connected to the frame through a second connecting portion and includes a second coil arranged to be inclined at a preset angle with respect to the rotational chuck and generates a magnetic field;
a stage that linearly moves the rotational chuck so that a relative position of the rotational chuck is adjusted with respect to the first coil and the second coil; and
a control unit that rotates the first connecting portion and the second connecting portion to control an angle between the first and second connecting portions and the frame and to adjust positions of the first and second coils.