US 12,475,297 B2
System and method for performing process model calibration in a virtual semiconductor device fabrication environment
William J. Egan, Framingham, MA (US); Kenneth B. Greiner, Concord, MA (US); David M. Fried, Los Gatos, CA (US); and Anshuman Kunwar, Jamaica Plain, MA (US)
Assigned to Coventor, Inc., Cary, NC (US)
Filed by Coventor, Inc., Cary, NC (US)
Filed on Nov. 7, 2023, as Appl. No. 18/503,718.
Application 18/503,718 is a continuation of application No. 17/477,472, filed on Sep. 16, 2021, granted, now 11,861,289.
Application 17/477,472 is a continuation of application No. 16/010,537, filed on Jun. 18, 2018, granted, now 11,144,701, issued on Oct. 12, 2021.
Claims priority of provisional application 62/631,022, filed on Feb. 15, 2018.
Claims priority of provisional application 62/521,506, filed on Jun. 18, 2017.
Prior Publication US 2024/0070373 A1, Feb. 29, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G06F 30/398 (2020.01); G06F 3/04815 (2022.01); G06F 3/04847 (2022.01); G06T 19/20 (2011.01); G06F 111/10 (2020.01)
CPC G06F 30/398 (2020.01) [G06F 3/04815 (2013.01); G06F 3/04847 (2013.01); G06T 19/20 (2013.01); G06F 2111/10 (2020.01); G06T 2200/16 (2013.01); G06T 2219/2004 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A non-transitory computer-readable medium holding computing device-executable instructions for performing variability analysis, the instructions when executed causing at least one computing device equipped with at least one processor to:
perform in a virtual fabrication environment a plurality of virtual fabrication runs for a semiconductor device based on a Design of Experiment (DOE) using 2D design data and a process sequence, the plurality of virtual fabrication runs building a plurality of 3D models;
receive, via a user interface of the virtual fabrication environment, a user selection of one or more targets in the plurality of 3D models on which to perform a variability analysis;
display, via the user interface results from the variability analysis, wherein the user interface includes a graph of a distribution of values of the selected one or more targets and an indication of normality of the values of the selected one or more targets;
receive, via the user interface, a selection of a different target in the plurality of 3D models; and
update the variability analysis presented in the user interface to include variability associated with the selected different target.