US 12,474,643 B2
System and method for performing alignment and overlay measurement through an opaque layer
Manjusha Mehendale, Morristown, NJ (US); George Andrew Antonelli, Portland, OR (US); Priya Mukundhan, Lake Hopatcong, NJ (US); Robin A. Mair, West Chicago, IL (US); and Francis C. Vozzo, Randolph, NJ (US)
Assigned to Onto Innovation Inc., Wilmington, MA (US)
Appl. No. 18/253,581
Filed by Onto Innovation Inc., Wilmington, MA (US)
PCT Filed Nov. 22, 2021, PCT No. PCT/US2021/060385
§ 371(c)(1), (2) Date May 18, 2023,
PCT Pub. No. WO2022/109411, PCT Pub. Date May 27, 2022.
Claims priority of provisional application 63/117,443, filed on Nov. 23, 2020.
Prior Publication US 2024/0004311 A1, Jan. 4, 2024
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70633 (2013.01) [G03F 7/70653 (2023.05); G03F 7/706849 (2023.05)] 23 Claims
OG exemplary drawing
 
9. An apparatus for non-destructive acoustic metrology of a target on a sample, the target comprising an overlying structure and an underlying structure, and an optically opaque layer is disposed between the overlying structure and the underlying structure, comprising:
an opto-acoustic metrology device configured to acquire opto-acoustic metrology data for the underlying structure at different locations;
an imaging device configured to image the sample;
a stage for holding the sample and configured to move the sample with respect to the opto-acoustic metrology device;
at least one processor coupled to the opto-acoustic metrology device, the imaging device, and the stage, the at least one processor configured to:
acquire opto-acoustic metrology data from the opto-acoustic metrology device for the underlying structure at different locations;
determine a location of the underlying structure using the opto-acoustic metrology data from the different locations;
acquire an image of the overlying structure of the target from the imaging device; and
determine a relative position of the overlying structure with respect to the underlying structure based on the location of the underlying structure determined using the opto-acoustic metrology data and a location of the overlying structure determined using the image of the overlying structure.