US 12,474,236 B2
Multistage gas sampling trap and detection of sulfurous species contaminant
Charles Miller, Taunton, MA (US)
Assigned to ENTEGRIS, INC., Billerica, MA (US)
Filed by ENTEGRIS, INC., Billerica, MA (US)
Filed on Jul. 3, 2024, as Appl. No. 18/764,100.
Application 18/764,100 is a continuation of application No. 17/737,627, filed on May 5, 2022, granted, now 12,066,360.
Claims priority of provisional application 63/185,812, filed on May 7, 2021.
Prior Publication US 2024/0361210 A1, Oct. 31, 2024
Int. Cl. G01N 1/22 (2006.01); G01N 30/06 (2006.01)
CPC G01N 1/2214 (2013.01) [G01N 1/2247 (2013.01); G01N 30/06 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A gas sampling system comprising a gas sampling trap, the gas sampling trap comprising:
a first stage including an inlet for receiving a flow of gas, the first stage containing a metal salt configured to react with sulfurous species contained in the gas to produce an acidic gas; and
a second stage fluidly connected to the first stage such that the acidic gas produced in the first stage flows into the second stage, the second stage containing an adsorbent substrate configured to adsorb the acidic gas flowing through the second stage,
wherein the gas sampling trap is directly connected to a gas source without a sampling manifold.