US 12,473,908 B2
Decompression system, control device, and control method
Akinori Goto, Fukuoka (JP)
Assigned to KABUSHIKI KAISHA YASKAWA DENKI, Fukuoka (JP)
Appl. No. 18/551,342
Filed by KABUSHIKI KAISHA YASKAWA DENKI, Fukuoka (JP)
PCT Filed Dec. 20, 2021, PCT No. PCT/JP2021/047051
§ 371(c)(1), (2) Date Sep. 19, 2023,
PCT Pub. No. WO2022/201685, PCT Pub. Date Sep. 29, 2022.
Claims priority of application No. 2021-050428 (JP), filed on Mar. 24, 2021.
Prior Publication US 2024/0175441 A1, May 30, 2024
Int. Cl. F04B 49/20 (2006.01); F04B 35/04 (2006.01); F04B 37/14 (2006.01); F04B 49/06 (2006.01); H02P 6/08 (2016.01); H02P 7/06 (2006.01); F04B 49/10 (2006.01); F04C 25/02 (2006.01); F04D 25/06 (2006.01); F04D 27/00 (2006.01)
CPC F04B 49/20 (2013.01) [F04B 35/04 (2013.01); F04B 37/14 (2013.01); F04B 49/06 (2013.01); H02P 6/08 (2013.01); H02P 7/06 (2013.01); F04B 49/065 (2013.01); F04B 49/10 (2013.01); F04B 2203/0207 (2013.01); F04C 25/02 (2013.01); F04D 25/06 (2013.01); F04D 27/004 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A decompression system comprising:
an electric pump that decompresses an internal space of a chamber with respect to an external space of the chamber;
a control circuit that:
controls a motor of the electric pump, generates a torque command to
operate the motor in accordance with an operation command,
limits the torque command to a limit value or less, and
temporarily increases the limit value in response to communication between the internal space and the external space; and
a power conversion circuit that generates driving power corresponding to the torque command passed through the control circuit and supplies the driving power to the motor.