| CPC F04B 43/0054 (2013.01) [F04B 43/009 (2013.01); F04B 45/0533 (2013.01); F04B 43/02 (2013.01); F04B 49/02 (2013.01); F04B 2201/0803 (2013.01); F04B 2205/06 (2013.01)] | 18 Claims |

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1. A diaphragm compressor, comprising
a compressor head comprising a hydraulic fluid plate having a fluid plate contact plane and a process fluid plate having a process plate contact plane, the hydraulic fluid plate and the process fluid plate forms a compression chamber when contact between the fluid plate contact plane and the process plate contact plane is established, the compression chamber is divided in an upper chamber and a lower chamber by a multi-layered diaphragm,
wherein a controller is configured for controlling an alternating movement of the multi-layered diaphragm towards the upper and the lower chambers respectively,
wherein a process fluid plate seal is positioned in a process fluid seal groove provided in the process plate contact plane, the process fluid plate seal forms a process fluid seal between an upper side of the multi-layered diaphragm and the process plate contact plane,
wherein the process fluid plate comprises a process fluid leak groove system fluidly connected to a process fluid plate leakage passage provided in the process fluid plate, and
wherein the process fluid leak groove system comprises an inner groove and an outer groove connected with a plurality of connection grooves.
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