US 12,473,639 B2
Methods for forming films on substrates
Alexander N. Lerner, San Jose, CA (US); Roey Shaviv, Palo Alto, CA (US); Prashanth Kothnur, San Jose, CA (US); Satish Radhakrishnan, San Jose, CA (US); and Xiaozhou Che, Sunnyvale, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 24, 2022, as Appl. No. 17/971,692.
Application 17/971,692 is a division of application No. 16/854,893, filed on Apr. 21, 2020, granted, now 11,505,863.
Claims priority of provisional application 62/855,672, filed on May 31, 2019.
Prior Publication US 2023/0042777 A1, Feb. 9, 2023
Int. Cl. C23C 16/448 (2006.01); C23C 14/00 (2006.01); C23C 16/00 (2006.01); C23C 16/455 (2006.01); C23C 16/458 (2006.01); C23C 16/52 (2006.01)
CPC C23C 16/4481 (2013.01) [C23C 14/00 (2013.01); C23C 16/00 (2013.01); C23C 16/45565 (2013.01); C23C 16/4588 (2013.01); C23C 16/52 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A process system for forming a film on a substrate, comprising:
a plurality of ampoules;
a process chamber comprising:
a showerhead, wherein the showerhead comprises a plurality of separate portions; and
a pedestal;
a plurality of delivery lines, wherein each delivery line of the plurality of delivery lines is connected from one of the plurality of ampoules to one of the plurality of separate portions of the showerhead; and
a controller configured to regulate operation of the process system, wherein the controller comprises a memory containing instructions for execution on a processor comprising:
controlling a temperature of and a pressure within a processing volume of each of the plurality of ampoules, wherein:
different materials are disposed within the process volume of each of the plurality of ampoules,
the process volume of each of the plurality of ampoules are in fluid communication with one of the plurality of separate portions of the showerhead that is coupled to a process volume of the process chamber, and
the controlled temperature is configured to cause each of the different materials to evaporate within each of the process volumes of the plurality of ampoules and flow to one of the plurality of separate portions of the showerhead;
controlling a flow rate of each of the different materials from each of the plurality of separate portions of the showerhead and into the process volume of the process chamber by separately controlling the temperature of each of the plurality of separate portions of the showerhead, wherein each separate portion of the plurality of separate portions of the showerhead are heated by separate heating elements;
controlling a pressure within the process chamber; and
controlling a rotation rate of a substrate on the pedestal disposed within the process volume of the process chamber, wherein the substrate is exposed to the flow of different materials provided from each of the plurality of separate portions of the showerhead.