US 12,473,638 B2
Liquid precursor vaporizer
Eric Russell Madsen, Sherwood, OR (US); Seyedalireza Torbatisarraf, San Jose, CA (US); Yu Jiang, San Jose, CA (US); and Narudha Tai Benyuhmin, Santa Clara, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/783,264
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed Dec. 7, 2020, PCT No. PCT/US2020/063637
§ 371(c)(1), (2) Date Jun. 7, 2022,
PCT Pub. No. WO2021/118935, PCT Pub. Date Jun. 17, 2021.
Claims priority of provisional application 62/946,864, filed on Dec. 11, 2019.
Prior Publication US 2023/0037208 A1, Feb. 2, 2023
Int. Cl. C23C 16/44 (2006.01); B22F 10/28 (2021.01); B22F 10/64 (2021.01); B33Y 10/00 (2015.01); B33Y 40/20 (2020.01); B33Y 80/00 (2015.01); C23C 16/448 (2006.01)
CPC C23C 16/448 (2013.01) [B22F 10/28 (2021.01); B22F 10/64 (2021.01); B33Y 10/00 (2014.12); B33Y 40/20 (2020.01); B33Y 80/00 (2014.12); B22F 2301/15 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A liquid precursor vaporizer comprising;
an inlet;
an outlet; and
a first vaporizer core, the first vaporizer core including a plurality of nested cells defining a plurality of confined and tortuous paths through which a liquid precursor can pass between adjacent nested cells in a path between the inlet and the outlet of the liquid precursor vaporizer,
wherein the first vaporizer core comprises a plurality of nested cells, wherein some of the nested cells has at least two protruding convex portions and two concave portions, one of the protruding convex portion adjoins but does not abut a concave portion of an adjacent cell to form an integrated nested cell structure, and another protruding convex portion adjoins but does not abut a concave portion of another adjacent cell to form an integrated nested cell structure, defining the plurality of confined and tortuous paths through which a liquid precursor can pass between the adjacent nested cells in the path between the inlet and the outlet of the liquid precursor vaporizer.