	US 12,473,637 B2
	Interlock system for processing chamber exhaust assembly
Daemian Raj Benjamin Raj, Fremont, CA (US); Liliya I. Krivulina, Santa Clara, CA (US); Bharath Kumar Hanchanoor Rathnakara Gowda, Cupertino, CA (US); Collen Leng, San Jose, CA (US); Syed A. Alam, San Jose, CA (US); Uwe P. Haller, San Jose, CA (US); Robert Casanova, San Jose, CA (US); Ryan Thomas Downey, San Jose, CA (US); and Peter Standish, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Aug. 8, 2022, as Appl. No. 17/883,368.
Prior Publication US 2024/0043994 A1, Feb. 8, 2024
Int. Cl. C23C 16/44 (2006.01); H01L 21/67 (2006.01)

CPC C23C 16/4412 (2013.01) [H01L 21/67248 (2013.01); H01L 21/67253 (2013.01)]

9 Claims

1. A method of abating gas from a processing chamber, comprising:

flowing a process gas to a processing chamber;

exhausting the process gas from the processing chamber via an exhaust assembly comprising:

a foreline; and

a pump fluidly coupled with the foreline;

flowing a dilution gas into a gas exhaust line downstream of the pump, wherein the dilution gas mixes with the process gas within the gas exhaust line;

measuring a temperature of the gas exhaust line;

reducing a flow rate of the process gas to the processing chamber when the temperature exceeds a predetermined threshold; and

adjusting a flow rate of the dilution gas when the temperature exceeds a preset threshold that is lower than the predetermined threshold.