US 12,473,636 B2
Atomic layer deposition derived protective coatings for calcium fluoride optical components
Donald Erwin Allen, Painted Post, NY (US); Gerald Philip Cox, Brockport, NY (US); Keith John Donohue, Fairport, NY (US); Ming-Huang Huang, Ithaca, NY (US); Hoon Kim, Horseheads, NY (US); and Jue Wang, Pittsford, NY (US)
Assigned to Corning Incorporated, Corning, NY (US)
Filed by CORNING INCORPORATED, Corning, NY (US)
Filed on Oct. 13, 2022, as Appl. No. 17/965,122.
Claims priority of provisional application 63/257,486, filed on Oct. 19, 2021.
Prior Publication US 2023/0123796 A1, Apr. 20, 2023
Int. Cl. C23C 16/40 (2006.01); C23C 16/455 (2006.01)
CPC C23C 16/403 (2013.01) [C23C 16/45536 (2013.01); C23C 16/45553 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A method of coating an optical component, the method comprising depositing an atomic layer deposition (ALD) coating on a surface of the optical component, wherein:
the optical component comprises crystalline calcium fluoride (CaF2);
the ALD coating comprises a metal fluoride having a metal that is different from calcium; and
the ALD coating is applied directly to the crystalline CaF2 and has a thickness of less than or equal to 10 nm.