US 12,473,628 B2
Wear and/or friction reduction by using molybdenum nitride based coatings
Johann Karner, Triesen (LI); Volker Derflinger, Feldkirch (AT); and Maximilian Erich Luichti, Chemnitz (DE)
Assigned to OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON, Pfaffikon (CH)
Filed by Oerlikon Surface Solutions AG, Pfäffikon, Pfäffikon (CH)
Filed on Oct. 18, 2021, as Appl. No. 17/503,563.
Application 17/503,563 is a continuation of application No. 15/575,031, granted, now 11,168,392, previously published as PCT/EP2016/000863, filed on May 25, 2016.
Claims priority of application No. 10 2015 006 510.6 (DE), filed on May 26, 2015; and application No. 10 2016 003 998.1 (DE), filed on Apr. 7, 2016.
Prior Publication US 2022/0145442 A1, May 12, 2022
Int. Cl. C23C 14/00 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/32 (2006.01); C23C 14/54 (2006.01); C23C 28/00 (2006.01); C23C 28/04 (2006.01); C23C 30/00 (2006.01); F16J 9/26 (2006.01)
CPC C23C 14/325 (2013.01) [C23C 14/0021 (2013.01); C23C 14/024 (2013.01); C23C 14/0641 (2013.01); C23C 14/542 (2013.01); C23C 28/042 (2013.01); C23C 28/044 (2013.01); C23C 28/42 (2013.01); C23C 30/005 (2013.01); F16J 9/26 (2013.01); Y10T 428/24975 (2015.01)] 5 Claims
OG exemplary drawing
 
1. A component comprising a substrate surface coated with a coating comprising at least one MoN layer having a thickness not less than 40 nm, and a layer system composed of more than 2 MoN layers and more than 2 CrN layers,
wherein the MON and the CrN layers forming the layer system are individual lavers deposited alternate one on each other forming a mutilayer MoN/CrN coating film, said layer system being disposed between the substrate surface and the at least one MoN layer,
wherein between the substrate surface and the at least one MoN layer a substrate surface hardened layer is comprised, which is a hardened, nitrogen-containing substrate surface layer that is the result of a nitriding treatment carried out at the substrate surface and has a thickness not less than 10 nm, and
wherein said at least one MoN layer consists of molybdenum nitride comprising a mixture of phases, the mixture comprising:
the hexagonal phase δ-MON and the cubic phase γ-Mo2N, or
the hexagonal phase δ-MON and the oversaturated cubic phase ζ-MON, or
the hexagonal phase δ-MON and the cubic phase γ-Mo2N and the oversaturated cubic phase ζ-MoN.