US 12,472,601 B2
Method of checking leakage of fluid and polishing apparatus
Toru Maruyama, Tokyo (JP); Yasuyuki Motoshima, Tokyo (JP); Shuji Uozumi, Tokyo (JP); Keisuke Kamiki, Tokyo (JP); and Mitsunori Komatsu, Tokyo (JP)
Assigned to EBARA CORPORATION, Tokyo (JP)
Filed by Ebara Corporation, Tokyo (JP)
Filed on Jun. 24, 2019, as Appl. No. 16/449,756.
Claims priority of application No. 2018-119667 (JP), filed on Jun. 25, 2018.
Prior Publication US 2019/0389030 A1, Dec. 26, 2019
Int. Cl. B24B 37/005 (2012.01); G01M 3/28 (2006.01)
CPC B24B 37/005 (2013.01) [G01M 3/2807 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A method of checking a leakage of fluid from a fluid line in which a supply valve and a return valve are disposed, the method comprising:
connecting a leakage checking line to the fluid line between the supply valve and the return valve;
regulating a pressure regulator disposed in the leakage checking line such that a pressure of fluid in the leakage checking line becomes the same as a pressure of fluid in the fluid line;
closing the supply valve and the return valve, and opening an opening/closing valve disposed in the leakage checking line;
acquiring a flow rate of the fluid that flows in the leakage checking line by a flowmeter disposed in the leakage checking line;
comparing the flow rate of the fluid acquired at the acquiring with a predetermined threshold; and
determining that the fluid of the fluid line is leaked, when the flow rate of the fluid acquired at the acquiring is larger than the predetermined threshold.