US 12,472,539 B2
Methods and apparatus for cleaning a vessel
Jereld Lee Winkler, Gilbert, AZ (US); Paul Ma, Scottsdale, AZ (US); Eric James Shero, Phoenix, AZ (US); Shubham Garg, Tempe, AZ (US); Jonathan Bakke, Phoenix, AZ (US); Todd Dunn, Cave Creek, AZ (US); Jacqueline Wrench, Mesa, AZ (US); and Shuaidi Zhang, Chandler, AZ (US)
Assigned to ASM IP Holding B.V., Almere (NL)
Filed by ASM IP Holding B.V., Almere (NL)
Filed on Nov. 15, 2023, as Appl. No. 18/509,375.
Claims priority of provisional application 63/426,433, filed on Nov. 18, 2022.
Prior Publication US 2024/0165681 A1, May 23, 2024
Int. Cl. B08B 9/08 (2006.01); B08B 9/46 (2006.01)
CPC B08B 9/0813 (2013.01) [B08B 9/46 (2013.01); B08B 2209/08 (2013.01)] 11 Claims
OG exemplary drawing
 
1. An apparatus, comprising:
a first vessel, comprising:
an interior volume defined by sidewalls, a top surface, and a bottom surface, wherein the sidewalls extend upwards from the bottom surface to the top surface;
a first inlet port disposed at the top surface;
a first inlet tube connected to the first inlet port, wherein the first inlet tube extends into the interior volume of the first vessel; and
a first outlet tube extending from the top surface towards the bottom surface; and
a second vessel, comprising:
an interior volume defined by sidewalls, a top surface, and a bottom surface;
a mechanism disposed within the interior volume of the second vessel and configured to expand and contract;
a second inlet tube connected to the first outlet tube;
a third inlet port configured to flow air into the mechanism; and
a second outlet port disposed at the bottom surface of the second vessel.