US 12,144,101 B2
Resonator, linear accelerator configuration and ion implantation system having rotating exciter
Costel Biloiu, Rockport, MA (US); David T. Blahnik, Round Rock, TX (US); Wai-Ming Tam, Manchester-by-the-Sea, MA (US); Charles T. Carlson, Cedar Park, TX (US); and Frank Sinclair, Boston, MA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 26, 2023, as Appl. No. 18/373,128.
Application 18/373,128 is a continuation of application No. 17/506,185, filed on Oct. 20, 2021, granted, now 11,812,539.
Prior Publication US 2024/0032183 A1, Jan. 25, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H05H 7/02 (2006.01); H05H 7/12 (2006.01); H05H 9/00 (2006.01)
CPC H05H 7/02 (2013.01) [H05H 7/12 (2013.01); H05H 9/00 (2013.01); H05H 2007/025 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A resonator for a linear accelerator, comprising:
a resonator chamber;
a resonator coil, disposed within the resonator chamber; and
an exciter, disposed at least partially within the resonator chamber and further comprising:
an exciter coil inner portion, extending along an exciter axis;
an exciter coil loop, disposed at a distal end of the exciter coil inner portion; and
a drive mechanism, the drive mechanism comprising at least a rotation component to rotate the exciter coil loop around the exciter axis.
 
15. A resonator for a linear accelerator, comprising:
a resonator chamber;
a solenoidal resonator coil, disposed within the resonator chamber; and
an exciter, disposed at least partially within the resonator chamber and outside the solenoidal resonator coil, the exciter further comprising:
an exciter coil inner portion, extending along an exciter axis;
an exciter coil loop, disposed at a distal end of the exciter coil inner portion; and
a drive mechanism, the drive mechanism comprising at least a rotation component to rotate the exciter coil loop around the exciter axis, in order to adjust a coupling of power from the exciter loop to the solenoidal resonator coil.