US 12,144,096 B2
Method for measuring electron nonextensive parameter of plasma using nonextensive statistical mechanics
Huibin Qiu, Nanchang (CN); Donghua Xiao, Nanchang (CN); Xingkun Peng, Nanchang (CN); Yuqing Zhu, Nanchang (CN); Xianyang Zhang, Nanchang (CN); Youlong Yuan, Nanchang (CN); Qilong Cai, Nanchang (CN); Tianyi Hu, Nanchang (CN); Yue Gao, Nanchang (CN); Zhiyi Ming, Nanchang (CN); Jinmao Zhou, Nanchang (CN); Zhenyu Zhou, Nanchang (CN); and Sanqiu Liu, Nanchang (CN)
Assigned to NANCHANG UNIVERSITY, Nanchang (CN)
Filed by NANCHANG UNIVERSITY, Nanchang (CN)
Filed on Dec. 17, 2021, as Appl. No. 17/554,405.
Application 17/554,405 is a continuation of application No. PCT/CN2020/084082, filed on Apr. 10, 2020.
Claims priority of application No. 201910985875.4 (CN), filed on Oct. 18, 2019.
Prior Publication US 2022/0110206 A1, Apr. 7, 2022
Int. Cl. H05H 1/00 (2006.01); H01J 37/32 (2006.01)
CPC H05H 1/0081 (2013.01) [H01J 37/32926 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A method for measuring an electron nonextensive parameter of a plasma, comprising:
using nonextensive statistical mechanics and electric probe to measure the nonextensive parameter of the plasma comprises:
step 1, describing the plasma with the nonextensive statistical mechanics to obtain a formula of I-V curve of the nonextensive single electric probe;
step 2, adjusting a bias voltage V of a power supply connected with a single probe device and collecting I-V experimental data by the single probe device including a single probe and a probe circuit connected with the single probe: wherein the single probe passes through a vacuum chamber wall and directly contacts the plasma
step 3, performing nonlinear fitting on the I-V experimental data collected in the step 2 by using the formula of I-V curve of the nonextensive single electric probe obtained in the step 1 to obtain a fitting curve, thereby obtaining a data set;
step 4, drawing a SSE−qFe curve using a sum of squares due to error (SSE) as a goodness of fit measure; wherein SSE=Σi=1n(yi−ŷi)2, ωi is a weight of an ith data point, yi is a y-coordinate of the ith data point, ŷi represents a y-coordinate of the fitting curve corresponding to an x-coordinate of the ith data point;
step 5, obtaining a value of the electron nonextensive parameter corresponding to a minimum value of the SSE according to the SSE−qFe curve;
step 6, drawing a R2−qFe curve using a nonlinear fitting coefficient of determination R2 as a goodness of fit measure;
step 7, obtaining a value of the electron nonextensive parameter corresponding to a maximum value of the R2 according to the R2−qFe curve; R2=1−SSE/SST, SST is a sum of squares total of a difference between the experimental data and a mean, and SST=Σi=1nωi(yi−yi)2;
step 8, comparing the values of the electron nonextensive parameter respectively corresponding to the minimum value of the SSE obtained in the step 5 and the maximum value of the R2 obtained in the step 7;
step 9, determining whether the values of the electron nonextensive parameter compared in the step 8 are consistent;
step 10, confirming any one of the values of the electron nonextensive parameter as an optimal value of the electron nonextensive parameter when the values of the electron nonextensive parameter are determined to be consistent;
step 11, substituting the optimal value of the electron nonextensive parameter obtained in the step 10 into the data set in the step 3 to obtain a target data set corresponding to the optimal value of the electron nonextensive parameter; and
step 12, outputting a measurement result report.