US 12,142,893 B2
Thermally-controlled photonic structure
Shibnath Pathak, San Jose, CA (US); Duanhua Kong, Milpitas, CA (US); Michael C. Larson, Oakland, CA (US); and Amit Mizrahi, San Jose, CA (US)
Assigned to Lumentum Operations LLC, San Jose, CA (US)
Filed by Lumentum Operations LLC, San Jose, CA (US)
Filed on Nov. 14, 2022, as Appl. No. 18/054,989.
Application 18/054,989 is a continuation of application No. 17/032,787, filed on Sep. 25, 2020, granted, now 11,502,480.
Claims priority of provisional application 63/017,380, filed on Apr. 29, 2020.
Prior Publication US 2023/0073927 A1, Mar. 9, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01S 3/04 (2006.01); H01S 5/024 (2006.01); H01S 5/06 (2006.01); H01S 5/068 (2006.01); H01S 5/22 (2006.01)
CPC H01S 5/02453 (2013.01) [H01S 5/0612 (2013.01); H01S 5/068 (2013.01); H01S 5/22 (2013.01); H01S 5/02461 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A thermally-controlled mirror structure, comprising:
an optical waveguide region suspended over a substrate,
wherein the optical waveguide region includes a grating for reflecting light;
a plurality of bridge elements connected to the optical waveguide region and configured to suspend the optical waveguide region over the substrate; and
at least one heater element disposed on the optical waveguide region,
wherein the at least one heater element is structured and arranged relative to the plurality of bridge elements to compensate for heat dissipation along the plurality of bridge elements and to control a temperature profile along the grating,
wherein the at least one heater element includes at least one concave section, and
wherein the at least one heater element is structured and arranged relative to the plurality of bridge elements such that the at least one concave section is in alignment with a bridge element of the plurality of bridge elements.