| CPC H01L 33/382 (2013.01) [H01L 33/0075 (2013.01); H01L 33/06 (2013.01); H01L 33/36 (2013.01); H01L 33/387 (2013.01); H01L 33/405 (2013.01); H01L 33/42 (2013.01); H01L 33/62 (2013.01); H01L 2224/48091 (2013.01); H01L 2224/48137 (2013.01); H01L 2224/49107 (2013.01); H01L 2933/0016 (2013.01)] | 20 Claims |

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1. A method of forming a light emitting die, comprising:
providing a solid state lighting structure including a first semiconductor material, a second semiconductor material, and an active region between the first and second semiconductor materials;
disposing a first electrode on a surface of the first semiconductor material opposite the active region; and
forming a second electrode extending through the first semiconductor material and the active region and having an end surface contacting the second semiconductor material.
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