US 12,142,702 B2
Optoelectronic device formed on a flexible substrate
Xiao Tang, Thuwal (SA); and Xiaohang Li, Thuwal (SA)
Assigned to KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY, Thuwal (SA)
Appl. No. 17/774,235
Filed by KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY, Thuwal (SA)
PCT Filed Nov. 5, 2020, PCT No. PCT/IB2020/060425
§ 371(c)(1), (2) Date May 4, 2022,
PCT Pub. No. WO2021/094880, PCT Pub. Date May 20, 2021.
Claims priority of provisional application 62/934,046, filed on Nov. 12, 2019.
Prior Publication US 2022/0393046 A1, Dec. 8, 2022
Int. Cl. H01L 31/032 (2006.01); C23C 14/08 (2006.01); C23C 16/40 (2006.01); C30B 23/02 (2006.01); C30B 25/18 (2006.01); C30B 29/16 (2006.01); G01J 1/42 (2006.01); H01L 31/0224 (2006.01); H01L 31/0392 (2006.01); H01L 31/18 (2006.01)
CPC H01L 31/032 (2013.01) [C23C 14/08 (2013.01); C23C 16/40 (2013.01); C30B 23/025 (2013.01); C30B 25/18 (2013.01); C30B 29/16 (2013.01); G01J 1/429 (2013.01); H01L 31/022408 (2013.01); H01L 31/03926 (2013.01); H01L 31/18 (2013.01)] 19 Claims
OG exemplary drawing
 
1. An optoelectronic device, comprising:
a flexible substrate;
a cerium oxide, CeO2, layer arranged on the flexible substrate;
a single crystal β-III-oxide layer arranged on the CeO2 layer; and
a metallic contact layer arranged on the single crystal β-III-oxide layer.