US 12,142,669 B2
Method for making nanostructure transistors with flush source/drain dopant blocking structures including a superlattice
Donghun Kang, San Jose, CA (US)
Assigned to ATOMERA INCORPORATED, Los Gatos, CA (US)
Filed by Atomera Incorporated, Los Gatos, CA (US)
Filed on Mar. 22, 2024, as Appl. No. 18/613,435.
Claims priority of provisional application 63/507,578, filed on Jun. 12, 2023.
Claims priority of provisional application 63/492,038, filed on Mar. 24, 2023.
Prior Publication US 2024/0322014 A1, Sep. 26, 2024
Int. Cl. H01L 29/66 (2006.01); H01L 29/15 (2006.01); H01L 29/417 (2006.01); H01L 29/775 (2006.01); H01L 29/786 (2006.01); H01L 29/423 (2006.01)
CPC H01L 29/66742 (2013.01) [H01L 29/158 (2013.01); H01L 29/41733 (2013.01); H01L 29/66439 (2013.01); H01L 29/775 (2013.01); H01L 29/78618 (2013.01); H01L 29/78696 (2013.01); H01L 29/42392 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for making a semiconductor device comprising:
forming a plurality of spaced apart gate stacks on a substrate defining respective trenches therebetween, each gate stack comprising alternating layers of first and second semiconductor materials, the layers of the second semiconductor material defining nanostructures;
forming respective source/drain regions within the trenches;
forming respective insulating regions adjacent lateral ends of the layers of the first semiconductor material; and
forming respective dopant blocking superlattices adjacent lateral ends of the nanostructures and flush with adjacent surfaces of the insulating regions, each dopant blocking superlattice comprising a plurality of stacked groups of layers, each group of layers comprising a plurality of stacked base semiconductor monolayers defining a base semiconductor portion, and at least one non-semiconductor monolayer constrained within a crystal lattice of adjacent base semiconductor portions.