US 12,142,572 B2
Semiconductor package including stacked semiconductor chips
Hyun Chul Seo, Icheon-si (KR)
Assigned to SK hynix Inc., Icheon-si (KR)
Filed by SK hynix Inc., Icheon-si Gyeonggi-do (KR)
Filed on Jan. 20, 2022, as Appl. No. 17/580,368.
Claims priority of application No. 10-2021-0111423 (KR), filed on Aug. 24, 2021.
Prior Publication US 2023/0068842 A1, Mar. 2, 2023
Int. Cl. H01L 23/538 (2006.01); H01L 25/065 (2023.01)
CPC H01L 23/5386 (2013.01) [H01L 23/5384 (2013.01); H01L 23/5385 (2013.01); H01L 25/0657 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A semiconductor package, comprising:
a substrate;
a first semiconductor chip positioned over the substrate and electrically connected to the substrate;
a plurality of second semiconductor chips positioned over the first semiconductor chip in a vertical direction, wherein the plurality of second semiconductor chips include a lowermost second semiconductor chip and an uppermost second semiconductor chip;
a third semiconductor chip positioned over the upper most second semiconductor chip stack;
a plurality of first bonding structures with a first pitch between the substrate and the first semiconductor chip, wherein each of the plurality of first bonding structures has a first height;
a plurality of second boding structures with a second pitch between the second semiconductor chips, wherein each of the plurality of second bonding structures has a second height; and
a plurality of third bonding structures with a third pitch between the uppermost second semiconductor chip and the third semiconductor chip, wherein each of the plurality of third bonding structures has a third height,
wherein the third height is greater than the second height.