US 12,142,503 B2
Sensor-based correction of robot-held object
Nicholas Michael Kopec, Santa Clara, CA (US); Damon K. Cox, Jarrell, TX (US); and Leon Volfovski, Mountain View, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 28, 2023, as Appl. No. 18/127,278.
Application 18/127,278 is a continuation of application No. 16/452,091, filed on Jun. 25, 2019, granted, now 11,626,305.
Prior Publication US 2023/0307273 A1, Sep. 28, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. B25J 9/16 (2006.01); G06T 1/00 (2006.01); H01L 21/67 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67265 (2013.01) [B25J 9/1679 (2013.01); G06T 1/0014 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67742 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A method comprising:
picking up an object on an end effector of a robot arm;
generating an image of the object on the end effector using an image sensor while the object is held on the end effector of the robot arm;
determining at least one of (i) a rotational error of the object based on an orientation of a registration feature reflected by the image of the object or (ii) a positional error of the object based on a position of the registration feature reflected by the image of the object;
adjusting the robot arm to approximately remove at least one of the rotational error or the positional error; and
placing the object at a first station using the robot arm without at least one of the rotational error or the positional error.