US 12,142,500 B2
Side storage pods, equipment front end modules, and methods for processing substrates
Devendra Channappa Holeyannavar, Bangalore (IN); Sandesh Doddamane Ramappa, Bangalore (IN); Dean C. Hruzek, Cedar Park, TX (US); Michael R. Rice, Pleasanton, CA (US); and Jeffrey A. Brodine, Los Gatos, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 2, 2023, as Appl. No. 18/116,759.
Application 18/116,759 is a continuation of application No. 17/080,595, filed on Oct. 26, 2020, granted, now 11,621,182.
Application 17/080,595 is a continuation of application No. 16/411,009, filed on May 13, 2019, granted, now 10,847,390, issued on Nov. 24, 2020.
Application 16/411,009 is a continuation of application No. 15/632,074, filed on Jun. 23, 2017, granted, now 10,388,547, issued on Aug. 20, 2019.
Prior Publication US 2023/0207354 A1, Jun. 29, 2023
Int. Cl. H01L 21/67 (2006.01); H01L 21/673 (2006.01); H01L 21/677 (2006.01)
CPC H01L 21/67178 (2013.01) [H01L 21/67184 (2013.01); H01L 21/6719 (2013.01); H01L 21/67196 (2013.01); H01L 21/67201 (2013.01); H01L 21/67379 (2013.01); H01L 21/67389 (2013.01); H01L 21/67769 (2013.01); H01L 21/67775 (2013.01); H01L 21/67207 (2013.01)] 20 Claims
OG exemplary drawing
 
17. A side storage pod configured to couple to an equipment front end module (EFEM), the side storage pod comprising:
a plurality of walls forming an interior volume, the plurality of walls comprising a top wall, bottom wall, and side walls; and
a platform disposed in the interior volume, the platform comprising a plurality of kinematic pins extending from an upper surface of the platform within the interior volume to engage a lower surface of a side storage container in the interior volume to level the side storage container in the interior volume.