US 12,142,466 B2
Automated transfer of edge ring requiring rotational alignment
Damon Tyrone Genetti, Livermore, CA (US); Roy Scott Powell, Boulder, CO (US); Darryl Angelo, Sunnyvale, CA (US); and Hui Ling Han, Alameda, CA (US)
Assigned to Lam Research Corporation, Fremont, CA (US)
Appl. No. 17/613,024
Filed by Lam Research Corporation, Fremont, CA (US)
PCT Filed May 8, 2020, PCT No. PCT/US2020/032056
§ 371(c)(1), (2) Date Nov. 19, 2021,
PCT Pub. No. WO2020/247146, PCT Pub. Date Dec. 10, 2020.
Claims priority of provisional application 62/858,274, filed on Jun. 6, 2019.
Prior Publication US 2022/0246408 A1, Aug. 4, 2022
Int. Cl. H01J 37/32 (2006.01); B65D 85/02 (2006.01); B65G 1/04 (2006.01); H01L 21/673 (2006.01); B25J 11/00 (2006.01); H01L 21/677 (2006.01); H01L 21/687 (2006.01)
CPC H01J 37/32807 (2013.01) [B65D 85/02 (2013.01); B65G 1/04 (2013.01); H01J 37/32642 (2013.01); H01L 21/67346 (2013.01); B25J 11/0095 (2013.01); H01J 2237/334 (2013.01); H01L 21/67742 (2013.01); H01L 21/68707 (2013.01)] 28 Claims
OG exemplary drawing
 
1. A ring storage station for delivering consumable parts used in a substrate processing system, comprising:
a housing including,
a base plate;
a rotating plate disposed over the base plate and configured to rotate along a horizontal plane about a central pivot pin disposed at a center of the base plate and extending through a center of the rotating plate;
an end-effector access opening disposed at a first side of the housing;
a service window opening disposed on a second side of the housing;
a set of finger support structures that include support fingers disposed on corresponding support columns, the set of finger support structures being connected to the rotating plate within the housing.