US 12,142,457 B2
Charged particle beam device
Takahiro Nishihata, Tokyo (JP); Mayuka Osaki, Tokyo (JP); Yuji Takagi, Tokyo (JP); Takuma Yamamoto, Tokyo (JP); and Makoto Suzuki, Tokyo (JP)
Assigned to Hitachi High-Tech Corporation, Tokyo (JP)
Appl. No. 17/771,551
Filed by Hitachi High-Tech Corporation, Tokyo (JP)
PCT Filed Oct. 6, 2020, PCT No. PCT/JP2020/037812
§ 371(c)(1), (2) Date Apr. 25, 2022,
PCT Pub. No. WO2021/085049, PCT Pub. Date May 6, 2021.
Claims priority of application No. 2019-199141 (JP), filed on Oct. 31, 2019.
Prior Publication US 2022/0367147 A1, Nov. 17, 2022
Int. Cl. H01J 37/28 (2006.01); H01J 37/22 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/222 (2013.01); H01J 37/244 (2013.01); H01J 2237/2443 (2013.01); H01J 2237/24485 (2013.01); H01J 2237/24495 (2013.01); H01J 2237/2817 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A charged particle beam device, comprising:
a plurality of detectors for detecting a signal particle emitted from a sample irradiated with a charged particle beam and converting the detected signal particle into an electrical signal;
an energy discriminator provided for each detector and configured to discriminate the electrical signal according to energy of the signal particle;
a discrimination control block for setting an energy discrimination condition of each of the energy discriminators;
and an image calculation block for generating an image based on the discriminated electrical signal, wherein the discrimination control block sets energy discrimination conditions different from each other among the plurality of energy discriminators,
wherein each of the energy discriminators generates an image gradation value based on the discriminated electrical signal, and the plurality of image gradation values are supplied in parallel to the image calculation block.