US 12,142,455 B2
Charged particle beam apparatus with multiple detectors and methods for imaging
Xuedong Liu, San Jose, CA (US); Weimin Zhou, San Jose, CA (US); Xiaoxue Chen, Fremont, CA (US); Xiaoyu Ji, Beijing (CN); Heng Li, San Jose, CA (US); Shahedul Hoque, Milpitas, CA (US); Zongyao Li, San Jose, CA (US); Shuhao Liu, San Jose, CA (US); and Weiming Ren, San Jose, CA (US)
Assigned to ASML Netherlands B.V., Veldhoven (NL)
Filed by ASML Netherlands B.V., Veldhoven (NL)
Filed on Apr. 8, 2021, as Appl. No. 17/226,017.
Claims priority of provisional application 63/008,457, filed on Apr. 10, 2020.
Prior Publication US 2021/0319977 A1, Oct. 14, 2021
Int. Cl. H01J 37/28 (2006.01); H01J 37/145 (2006.01); H01J 37/147 (2006.01); H01J 37/244 (2006.01)
CPC H01J 37/28 (2013.01) [H01J 37/145 (2013.01); H01J 37/1474 (2013.01); H01J 37/244 (2013.01); H01J 2237/24475 (2013.01); H01J 2237/2448 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An electron beam apparatus comprising:
an electron source configured to generate a primary electron beam along a primary optical axis;
a compound objective lens comprising a magnetic lens and an electrostatic lens, the magnetic lens comprising a cavity configured to allow the primary electron beam to pass through; and
a first electron detector configured to detect a first portion of a plurality of signal electrons generated from a sample,
wherein the first electron detector is located immediately upstream from a polepiece of the magnetic lens with respect to a path of the primary electron beam along the primary optical axis and inside the cavity of the magnetic lens.