US 12,142,450 B2
Photoelectric-surface electron source
Tomohiko Hirano, Hamamatsu (JP); Hiroyuki Taketomi, Hamamatsu (JP); Motohiro Suyama, Hamamatsu (JP); Wataru Matsudaira, Hamamatsu (JP); Akihiro Kageyama, Hamamatsu (JP); Kota Iwasaki, Yokohama (JP); and Taku Yamada, Yokohama (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 18/021,457
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jun. 9, 2021, PCT No. PCT/JP2021/021957
§ 371(c)(1), (2) Date Feb. 15, 2023,
PCT Pub. No. WO2022/038867, PCT Pub. Date Feb. 24, 2022.
Claims priority of application No. 2020-140141 (JP), filed on Aug. 21, 2020.
Prior Publication US 2023/0343541 A1, Oct. 26, 2023
Int. Cl. H01J 1/34 (2006.01); H01J 1/88 (2006.01)
CPC H01J 1/34 (2013.01) [H01J 1/88 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A photoelectric-surface electron source comprising:
a substrate configured to receive light incident from a substrate light-receiving surface and emit the light from a substrate main surface on a side opposite to the substrate light-receiving surface;
a photoelectric surface provided on the substrate main surface to receive the light to emit photoelectrons; and
an extraction electrode fixed to the substrate main surface to extract the photoelectrons from the photoelectric surface,
wherein the extraction electrode includes:
an electrode part that is disposed to be separated from the photoelectric surface on the substrate main surface side and provided with holes through which the photoelectrons pass,
a frame part fixed to a region surrounding the photoelectric surface on the substrate main surface, and
an electrode body made of a semiconductor material and a conductive film covering a surface of the electrode body.