US 12,142,441 B2
MEMS structure-based adjustable capacitor
Qingnan Meng, Hubei (CN)
Assigned to ACCULA TECHNOLOGIES HONG KONG COMPANY LIMITED, Hong Kong (CN); ACCULA ELECTRONIC TECHNOLOGIES PTE. LTD, Singapore (SG); ACCLUA TECHNOLOGY INC., Vancouver (CA); and ACCULA COMMUNICATION ELECTRONIC COMPANY PTE LTD, Singapore (SG)
Appl. No. 17/784,629
Filed by ACCULA TECHNOLOGIES HONG KONG COMPANY LIMITED, Hong Kong (CN); ACCULA ELECTRONIC TECHNOLOGIES PTE. LTD, Singapore (SG); ACCLUA TECHNOLOGY INC., Vancouver (CA); and ACCULA COMMUNICATION ELECTRONIC COMPANY PTE LTD, Singapore (SG)
PCT Filed Aug. 24, 2020, PCT No. PCT/CN2020/110778
§ 371(c)(1), (2) Date Jun. 11, 2022,
PCT Pub. No. WO2022/027738, PCT Pub. Date Feb. 10, 2022.
Claims priority of application No. 202010771747.2 (CN), filed on Aug. 4, 2020.
Prior Publication US 2023/0170154 A1, Jun. 1, 2023
Int. Cl. H01G 5/38 (2006.01); H01G 5/011 (2006.01); H01G 5/013 (2006.01); H01G 5/16 (2006.01)
CPC H01G 5/38 (2013.01) [H01G 5/011 (2013.01); H01G 5/013 (2013.01); H01G 5/16 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A Micro-Electro-Mechanical System (MEMS) structure-based adjustable capacitor, comprising a lower plate A, a movable plate B, an upper plate C, a fixed apparatus D and one or more connecting conductors E; wherein a lower end of the fixed apparatus D is fixedly connected to the lower plate A, an upper end of the fixed apparatus D is fixedly connected to the upper plate C, the movable plate B is provided with a structure B4 which is able to move freely in parallel in cooperation with the fixed apparatus D, the movable plate B is mounted on the fixed apparatus D by means of the structure B4, and the movable plate B is able to move up and down along the fixed apparatus D;
the lower plate A is provided with a lower electrode A1, and the movable plate B is provided with a movable electrode B1 and adjustment electrodes B2;
the lower electrode A1 and the movable electrode B1 constitute a unit capacitor, and the lower electrode A1 and the movable electrode B1 are isolated by means of a dielectric;
the upper plate C is provided with an upper electrode C1 and adjustment electrodes C2; two ends of each of the one or more connecting conductors E are respectively electrically connected to the upper electrode C1 and the movable electrode B1;
the adjustment electrodes C2 and the adjustment electrodes B2 constitute adjustment units, and the adjustment electrodes C2 and the adjustment electrodes B2 are isolated by means of a dielectric; and
in a working state, the lower electrode A1 is constantly applied with a working voltage, the working voltage generates an electrostatic attraction force on the movable electrode B1, and an electrostatic attraction force of the adjustment electrodes C2 on the adjustment electrodes B2 is adjusted by controlling an adjustable voltage applied to the adjustment electrodes C2, or by adjusting areas, spacings and/or materials of the adjustment electrodes C2, so that a magnitude relationship between an attraction force of the lower electrode A1 on the movable plate B and an attraction force of the adjustment electrodes C2 on the movable plate B changes, thereby enabling the movable plate B to move up and down along the fixed apparatus D to adjust a capacitance value of the MEMS structure-based adjustable capacitor.