| CPC G03F 7/709 (2013.01) [G03F 7/70725 (2013.01); G03F 7/70883 (2013.01)] | 19 Claims |
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1. A processing apparatus comprising:
a first structure;
a drive mechanism supported by the first structure and configured to drive an object to be processed;
a second structure supported by the first structure and facing the object;
an actuator configured to apply a force to the first structure;
a sensor configured to detect a vibration of the second structure; and
a controller configured to control driving of the object by the drive mechanism based on drive information and to feedforward-control the actuator based on feedforward control information so as to reduce vibrations of the first structure and the second structure,
wherein the feedforward control information includes first control information determined in advance based on an output from the sensor when driving of the object is controlled by the drive mechanism based on the drive information,
the feedforward control information further includes second control information determined in advance so as to reduce a vibration of the first structure when driving of the object is controlled by the drive mechanism based on the drive information,
the controller feedforward-controls the actuator based on the first control information in a first period and feedforward-controls the actuator based on the second control information in a second period, and
the first period is a period starting after a start of the second period.
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