US 12,140,873 B2
Positioning device
Paul Corné Henri De Wit, Eindhoven (NL); and Ringo Petrus Cornelis Van Dorst, Boxtel (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 17/793,525
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Jan. 14, 2021, PCT No. PCT/EP2021/050711
§ 371(c)(1), (2) Date Jul. 18, 2022,
PCT Pub. No. WO2021/151682, PCT Pub. Date Aug. 5, 2021.
Claims priority of application No. 20154103 (EP), filed on Jan. 28, 2020.
Prior Publication US 2023/0121341 A1, Apr. 20, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70775 (2013.01) [G03F 7/70716 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A positioning device, comprising:
a first positioning module arranged to support and position a first substrate,
a second positioning module arranged to support and position a second substrate,
a first positioning field in which the first and second positioning modules can be alternatingly positioned to carry out a first processing sequence, the first positioning field configured to allow position measurement of the first or second positioning module when respectively in the first positioning field and to allow zeroing measurement of the first or second positioning module when respectively in the first positioning field,
a second positioning field in which the first and second positioning modules can be alternatingly positioned to carry out a second processing sequence,
wherein when one of the first and second positioning modules is carrying out or finishing the first processing sequence, the other of the first and second positioning modules has finished the second processing sequence and is positioned closer to the one of the first and second positioning modules than in a position where the second processing sequence takes place, and
wherein the other positioning module is configured to be able to carry out the zeroing measurement of the other positioning module without the position measurement of the other positioning module being available in the first positioning field.