US 12,140,870 B2
Double-scanning opto-mechanical configurations to improve throughput of particle inspection systems
Michal Emanuel Pawlowski, Norwalk, CT (US)
Assigned to ASML Holding N.V., Veldhoven (NL)
Appl. No. 18/018,127
Filed by ASML Holding N.V., Veldhoven (NL)
PCT Filed Jul. 20, 2021, PCT No. PCT/EP2021/070305
§ 371(c)(1), (2) Date Jan. 26, 2023,
PCT Pub. No. WO2022/023129, PCT Pub. Date Feb. 3, 2022.
Claims priority of provisional application 63/058,558, filed on Jul. 30, 2020.
Prior Publication US 2023/0350308 A1, Nov. 2, 2023
Int. Cl. G03F 7/00 (2006.01)
CPC G03F 7/70191 (2013.01) 20 Claims
OG exemplary drawing
 
1. A system, comprising:
a radiation system configured to:
transmit, during a first portion of an exposure time period, a first radiation beam toward a first region of a first surface of a substrate; and
transmit, during a second portion of the exposure time period, a second radiation beam toward a second region of the first surface of the substrate;
a spatial filtering system configured to block radiation reflected from a second surface of the substrate disposed opposite the first surface of the substrate; and
an imaging system configured to:
capture, during the first portion of the exposure time period, a first sub-image of the first region based on first radiation scattered from the first region in response to a first irradiation of the first region by the first radiation beam;
capture, during the second portion of the exposure time period, a second sub-image of the second region based on second radiation scattered from the second region in response to a second irradiation of the second region by the second radiation beam; and
generate a composite image by displaying the first sub-image and the second sub-image substantially simultaneously.