	US 12,140,864 B2
	Large area seamless master and imprint stamp manufacturing method
Manivannan Thothadri, Mountain View, CA (US); Kevin Laughton Cunningham, Belmont, CA (US); and Arvinder Chadha, San Jose, CA (US)
Assigned to APPLIED MATERIALS, INC., Santa Clara, CA (US)
Appl. No. 17/428,001
Filed by Applied Materials, Inc., Santa Clara, CA (US)
PCT Filed Feb. 9, 2020, PCT No. PCT/US2020/017385 § 371(c)(1), (2) Date Aug. 3, 2021, PCT Pub. No. WO2020/167617, PCT Pub. Date Aug. 20, 2020.
Claims priority of provisional application 62/804,019, filed on Feb. 11, 2019.
Prior Publication US 2022/0121114 A1, Apr. 21, 2022
Int. Cl. G03F 7/00 (2006.01); B29C 35/02 (2006.01); B29C 59/02 (2006.01); B82Y 40/00 (2011.01); B82Y 10/00 (2011.01)

CPC G03F 7/0015 (2013.01) [B29C 35/02 (2013.01); B29C 59/026 (2013.01); B82Y 40/00 (2013.01); B29C 59/02 (2013.01); B82Y 10/00 (2013.01); G03F 7/0002 (2013.01); G03F 7/0035 (2013.01)]

15 Claims

1. A method of forming a seamless master, comprising:

depositing a first anti-stick layer on a substrate;

aligning a plurality of masters on the substrate, each master having a plurality of features extending from a first surface, the first surface of the plurality of masters being conformal with the first anti-stick layer;

adhering a second surface of the plurality of masters to a backing plate, the second surface being opposite the first surface, wherein adjacent masters of the plurality of masters have a seam therebetween extending from the first anti-stick layer to the backing plate;

upon aligning the plurality of masters on the substrate and adhering the second surface of the plurality of masters to the backing plate, filling the seam between the adjacent masters of the plurality of masters with a filler material;

curing the filler material; and

removing the plurality of masters from the first anti-stick layer and the substrate.