US 12,140,802 B2
1D apodized grating devices and methods for suppressing optical noise
Feng-Wei Kuo, Zhudong Township, Hsinchu County (TW)
Assigned to Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed by Taiwan Semiconductor Manufacturing Co., Ltd., Hsin-Chu (TW)
Filed on May 28, 2021, as Appl. No. 17/334,365.
Prior Publication US 2022/0381991 A1, Dec. 1, 2022
Int. Cl. G02B 6/34 (2006.01); G02B 6/30 (2006.01)
CPC G02B 6/34 (2013.01) [G02B 6/30 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A grating coupler comprising:
a substrate comprising a silicon wafer;
a first grating region having a first floor etched into the substrate,
wherein the first grating region comprises a first plurality of gratings having a first predetermined height measured relative to the first floor; and
a second grating region having a second floor etched into the substrate,
wherein the second grating region comprises a second plurality of gratings having a second predetermined height measured relative to the second floor,
wherein the first and second predetermined heights are not identical and a relative distance between the first floor and the second floor is not zero.