CPC G02B 27/0179 (2013.01) [G02B 27/0149 (2013.01); G02B 27/0172 (2013.01); G02B 27/0176 (2013.01); G02B 30/20 (2020.01); G02B 30/33 (2020.01); G02B 27/0093 (2013.01); G02B 2027/0134 (2013.01); G02B 2027/0159 (2013.01); G02B 2027/0187 (2013.01)] | 20 Claims |
1. A multi-degree of freedom (DOF) moving stage comprising:
an end-effector;
a plurality of driving links;
a plurality of actuators configured to drive the plurality of driving links; and
a plurality of driven links each including a first joint portion connected to the end-effector and a second joint portion connected to a respective one of the plurality of driving links,
wherein for each of the plurality of driven links, at least one of the first joint portion and the second joint portion comprises a joint structure comprising a first flexible member, a first rigid member, and a second rigid member,
wherein the first rigid member and the second rigid member are arranged apart from each other such that a first gap between the first rigid member and the second rigid member exposes a first surface of the first flexible member, and
wherein castellated patterns having shapes complementary to each other are respectively provided at a first end portion of the first rigid member adjacent to the first gap and a second end portion of the second rigid member adjacent to the first gap.
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